Clean air conditioning system design for a glass substrate processing plant

Wu Weilan, He Sifeng, Li Ting, Zhou Lin, Xiang Lingjun and Zhang Zhu

2020.06.15

Presents the design of the air conditioning cold and heat source, water system, air system and automatic control system. Based on the actual demands of the project, adopts the non-unidirectional flow in ISO level 5 clean rooms, the independent control of temperature, relative humidity and cleanliness, and other technical measures to meet the environmental control objectives and reduce the initial investment and operating costs as well. The project has successfully passed the acceptance test and been in operation for three years. All the indoor parameters of the clean rooms meet the design requirements. The project design can provide reference for the similar projects.